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Formation of Silicon on Insulator (Soi) With Separation by Plasma Implantation of Oxygen (Spimox) — J. B. Liu (1994) | RDL Network
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Formation of Silicon on Insulator (Soi) With Separation by Plasma Implantation of Oxygen (Spimox)
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Paul Kim Ho Chu
Formation of Silicon on Insulator (Soi) With Separation by Plasma Implantation of Oxygen (Spimox)
Article
1994
en
Authors
+4 more
JL
J. B. Liu
SI
Siddharth Iyer
JM
Junhong Min
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