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Competitive Oxidation During Buried Oxide Formation Using Separation by Plasma Implantation of Oxygen (Spimox) — Jingbao Liu (1995) | RDL Network
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Competitive Oxidation During Buried Oxide Formation Using Separation by Plasma Implantation of Oxygen (Spimox)
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Paul Kim Ho Chu
Competitive Oxidation During Buried Oxide Formation Using Separation by Plasma Implantation of Oxygen (Spimox)
Article
1995
en
Authors
+4 more
JL
Jingbao Liu
SI
S. Sundar Kumar Iyer
JM
Jing Min
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