Skip to content
RDL
Network
Ecosystem
Switch app
TR
About
FAQ
Sign in
Get started
Formation of Silicon on Insulator (Soi) With Separation by Plasma Implantation of Oxygen (Spimox) — J. B. Liu (1994) | RDL Network
Back
Cite
Save
Save for later
Share
Home
Publications
Formation of Silicon on Insulator (Soi) With Separation by Plasma Implantation of Oxygen (Spimox)
Shared by
Paul Kim Ho Chu
Formation of Silicon on Insulator (Soi) With Separation by Plasma Implantation of Oxygen (Spimox)
Article
1994
en
Authors
+4 more
JL
J. B. Liu
SI
Siddharth Iyer
JM
Junhong Min
Discussion
(0)
Sign in
to like and join the discussion.
No comments yet. Be the first to comment.
Related publications
Article
1997
Separation of plasma implantation of oxygen to form silicon on insulator
Xiang Lü
,
S. Sundar Kumar Iyer
,
Jingbao Liu
,
Chenming Hu
,
N.W. Cheung
,
Jing Min
,
Paul Kim Ho Chu
Article
1996
Nucleation mechanism of SPIMOX (separation by plasma implantation of oxygen)
Junhong Min
,
Paul Kim Ho Chu
,
Yaqi Cheng
,
J.B. Liu
,
S. Sundar Kumar Iyer
,
N.W. Cheung
Article
1995
Competitive Oxidation During Buried Oxide Formation Using Separation by Plasma Implantation of Oxygen (Spimox)
Jingbao Liu
,
S. Sundar Kumar Iyer
,
Jing Min
,
Paul Kim Ho Chu
,
R. Grónsky
,
Chenming Hu
,
N.W. Cheung
Article
1997
Separation by plasma implantation of oxygen (SPIMOX) operational phase space
S. Sundar Kumar Iyer
,
Xiang Lü
,
Jingbao Liu
,
Jing Min
,
Zhineng Fan
,
Paul Kim Ho Chu
,
Chenming Hu
,
N.W. Cheung
Article
2002
Operational phase-space of separation by plasma implantation of oxygen (SPIMOX)
S. Sundar Kumar Iyer
,
Xiang Lü
,
Jingbao Liu
,
B.P. Linder
,
Chenming Hu
,
N.W. Cheung
,
Jing Min
,
Zhineng Fan
,
Paul Kim Ho Chu
Discussion(0)
No comments yet. Be the first to comment.