Fabrication of tantalum oxyfluoride and oxynitride thin films via ammonolysis of sol–gel processed tetraethoxo (β-diketonato) tantalum (V) precursors for enhanced photocatalytic activity — Mohd. Danish (2021) | RDL Network
Fabrication of tantalum oxyfluoride and oxynitride thin films via ammonolysis of sol–gel processed tetraethoxo (β-diketonato) tantalum (V) precursors for enhanced photocatalytic activity
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