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Fabrication of silicon-on-AlN novel structure and its residual strain characterization — Zhenghua An (2002) | RDL Network
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Fabrication of silicon-on-AlN novel structure and its residual strain characterization
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Paul Kim Ho Chu
Fabrication of silicon-on-AlN novel structure and its residual strain characterization
Article
2002
en
Authors
+3 more
ZA
Zhenghua An
CM
Chuanling Men
XX
Xinyun Xie
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