Epitaxial lift-off arrays of GaAs LEDs over wafer-scale Si VLSI for optical interconnect technology

Wei Chang; Eli Yablonovitch; E.L. Dines; Alberto Pepe; David E. Ludwig

doi:10.1109/ofc.1996.907734

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Epitaxial lift-off arrays of GaAs LEDs over wafer-scale Si VLSI for optical interconnect technology

Article 2005 en

Abstract

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Summary form only given. In conclusion, we have developed a manufacturable and cost-effective epitaxial lift off (ELO) process to integrate a 2" GaAs wafer, containing LEDs, over 5" Si wafer with functioning dies.

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Epitaxial lift-off arrays of GaAs LEDs over wafer-scale Si VLSI for optical interconnect technology

Abstract

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Related publications

Epitaxial lift-off for wafer-scale GaAs-on-Si semi-monolithic integration

Demonstration Of GaAs LEDs On Si Chips Using Epitaxial Liftoff

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&lt;title&gt;Integration of GaAs LEDs with silicon circuits by epitaxial lift-off&lt;/title&gt;

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