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Effects of capacitively-coupled radio-frequency discharge on operation voltage in magnetron sputtering — Chunzhi Gong (2009) | RDL Network
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Effects of capacitively-coupled radio-frequency discharge on operation voltage in magnetron sputtering
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Paul Kim Ho Chu
Effects of capacitively-coupled radio-frequency discharge on operation voltage in magnetron sputtering
Article
2009
en
Authors
+3 more
CG
Chunzhi Gong
XT
Xiubo Tian
ML
Muqin Li
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