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Dynamic transition in the discharge current between gas-dominant discharge and self-sputtering in high-power impulse magnetron sputtering — Zhongzhen Wu (2016) | RDL Network
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Dynamic transition in the discharge current between gas-dominant discharge and self-sputtering in high-power impulse magnetron sputtering
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Paul Kim Ho Chu
Dynamic transition in the discharge current between gas-dominant discharge and self-sputtering in high-power impulse magnetron sputtering
Article
2016
en
Authors
+5 more
ZW
Zhongzhen Wu
SX
Shu Xiao
ZM
Zhengyong Ma
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