Designing a non-volatile imaging switch for mass-persistent, chemically amplified photolithography: a model study
Article 2002 en
Authors
JK
John M. Klopp
NB
Nicolas Bensel
ZF
Zachary M. Fresco
Abstract
1 min read
An acid catalysed rearrangement that transforms a bicyclic lactone into a phenolic carboxylic acid has been tested for potential use in chemically amplified microlithographic imaging.
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