Dense Al2o3 Films Prepared by High Power Impulse Magnetron Sputtering at Pulsed Kv Bias

Zhongzhen Wu; Dongjie Yang; Yaoyao Liu; Xiang Zhang; Shu-sheng Chen; Xiaowei Wang; Yu Liao; Xiaokai An; Yanfei Zhao; Lingjie Chen; Suihan Cui; Liangliang Liu; Ricky K.Y. Fu; Paul Kim Ho Chu

doi:10.2139/ssrn.4838111

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