Conformal ALD of tin-doped indium oxide transparent p-ohmic contacts for micro- and nano-LEDs
Article 2025 en
Authors
SP
Sohyeon Park
TK
Taeseok Kim
SP
Sung Hyuk Park
Abstract
1 min read
A bilayer PEALD ITO/ALD In 2 O 3 enables conformal, smooth, transparent, and damage-free p-ohmic contacts for high-efficiency GaN-based micro- and nano-LEDs.
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