Formation of High-Quality Ag-Based Ohmic Contacts to p-Type GaN

Low resistance and high reflectance ohmic contacts on p-type GaN were achieved using an Ag-based metallization scheme. Oxidation annealing was the key to achieve ohmic behavior of Ag-based contacts on p-type GaN. A low contact resistivity of 5 10 -5 cm 2 could be achieved from Me =Ni, Ir, Pt, or Ru/Ag 50/1200 contacts after annealing at 500C for 1 min in O 2 ambient. Oxidation annealing promoted the out-diffusion of Ga atoms from the GaN layer, and Ga atoms dissolved in the in-diffused Ag layer with the formation of Ag-Ga solid solution, resulting in ohmic contact formation. Using Ru/Ni/Au 500/200/500 overlayers on the Me/Ag contacts, the excessive incorporation of oxygen molecules into the contact interfacial region, and the out-diffusion and agglomeration of Ag, were effectively prevented during oxidation annealing. As a result, a high reflectance of 87.2% at the 460 nm wavelength and a smooth surface morphology could be obtained simultaneously.