Combined X-ray Texture-Structure-Microstructure Analysis Applied to Ferroelectric Ultrastructures: A Case Study on Pb 0.76 Ca 0.24 TiO 3

A new methodology for a quantitative description of texture, structure and other microstructural parameters of thin layers using X-ray diffraction is presented and applied to the case of a ferroelectric thin film of Pb 0.76 Ca 0.24 TiO 3 on a Pt/TiO 2 /SiO 2 /Si substrate. The approach allows the quantitative texture analysis of the ferroelectric thin film and the Pt electrode, refining simultaneously their structure, layers thickness, mean crystallite size and microstrain state. The powerfulness of this methodology is discussed and compared with other approaches.