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CHEMICAL AMPLIFICATION IN THE DESIGN OF POLYMERS FOR RESIST APPLICATIONS. — C. Grant Willson (1982) | RDL Network
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CHEMICAL AMPLIFICATION IN THE DESIGN OF POLYMERS FOR RESIST APPLICATIONS.
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Jean Mj Frechet
University of California, Berkeley
CHEMICAL AMPLIFICATION IN THE DESIGN OF POLYMERS FOR RESIST APPLICATIONS.
Article
1982
en
Authors
+1 more
CW
C. Grant Willson
HI
Hiroshi Itô
Jean Mj Frechet
University of California, Berkeley
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