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Charging of dielectric substrate materials during plasma immersion ion implantation — Xiubo Tian (2002) | RDL Network
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Charging of dielectric substrate materials during plasma immersion ion implantation
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Paul Kim Ho Chu
Charging of dielectric substrate materials during plasma immersion ion implantation
Article
2002
en
Authors
+2 more
XT
Xiubo Tian
RF
Ricky K.Y. Fu
JC
Junying Chen
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