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Capacitance of high-voltage coaxial cable in plasma immersion ion implantation — Xu Tian (2001) | RDL Network
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Capacitance of high-voltage coaxial cable in plasma immersion ion implantation
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Paul Kim Ho Chu
Capacitance of high-voltage coaxial cable in plasma immersion ion implantation
Article
2001
en
Authors
+2 more
XT
Xu Tian
LW
L. P. Wang
DK
Dixon T. K. Kwok
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