An Experimental/Computational Approach to Identify Moduli and Residual Stress in MEMS Radio-Frequency Switches — Horacio D. Espinosa (2003) | RDL Network
An Experimental/Computational Approach to Identify Moduli and Residual Stress in MEMS Radio-Frequency Switches
Experimental Mechanics 43(3): 309-316
Article 2003 English
Authors
HE
Horacio D. Espinosa
YZ
Yong Zhu
MF
M. Fischer
Abstract
1 min read
In this paper, we identify the Young's modulus and residual stress state of a free-standing thin aluminum membrane, used in MEMS radio-frequency (rf) s
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