An experimental/computational approach to identify moduli and residual stress in MEMS radio-frequency switches
Experimental Mechanics 43(3): 309-316
Article 2003 English
Authors
HE
H. D. Espinosa
YZ
Yong Zhu
MF
M. Fischer
Abstract
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In this paper, we identify the Young's modulus and residual stress state of a free-standing thin aluminum membrane, used in MEMS radio-frequency (rf) s
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