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A comparative study of the properties of TiN films deposited by MAIP and FCAP — Yong Zhang (2007) | RDL Network
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A comparative study of the properties of TiN films deposited by MAIP and FCAP
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Zhong Lin Wang
Beijing Institute of Technology
A comparative study of the properties of TiN films deposited by MAIP and FCAP
Article
2007
en
Authors
+2 more
YZ
Yong Zhang
JN
Jianlei Niu
Zhong Lin Wang
Beijing Institute of Technology
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