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Composition, morphology and mechanical properties of plasma-assisted chemically vapor-deposited TiN films on M2 tool steel — Michael R. Hilton (1986) | RDL Network
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Composition, morphology and mechanical properties of plasma-assisted chemically vapor-deposited TiN films on M2 tool steel
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Gabor Somorjai
University of California, Berkeley
Composition, morphology and mechanical properties of plasma-assisted chemically vapor-deposited TiN films on M2 tool steel
Article
1986
en
Authors
+2 more
MH
Michael R. Hilton
LN
L. R. Narasimhan
SN
S. Nakamura
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