A method to quantify the composition of anodic oxide films on aluminum using Infrared Spectroscopic Ellipsometry (IRSE) is proposed. It consists of obtaining the absorption coefficient of the film as a function of wavelength. Using values of the absorption coefficients for the pure components of the film, the percentages (mole or wt%) of each component in the sample can be calculated.The method is demonstrated in a study of the structure of the oxide film on electropolished aluminum and the anodically formed barrier layer film. Both surface oxides were found to be initially a form of amorphous Al2O3. While the barrier film is essentially free of water as prepared, the film on electropolished aluminum contained about 25 wt% water. Hydration of both types of films by immersion in boiling water results in the formation of pseudoboehmite (AlOOH). The technique may have more general applicability to the quantitative determination of the composition of corrosion films and other surface layers on metals.
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