Sub-50 mV NEM relay operation enabled by self-assembled molecular coating

Sub-50 mV operation of nano-electro-mechanical relays is demonstrated for the first time, enabled by an anti-stiction molecular coating. Specifically, a self-assembled monolayer of perfluorodecyltriethoxysilane (PFDTES) is shown to be effective for reducing the switching hysteresis voltage, without dramatically increasing its ON-state resistance, enabling stable device operation at very low voltages.