A simulated annealing method for material parameter extraction with terahertz time-domain spectroscopy is introduced to improve the common extraction method. The simulated annealing method seeks the global minimum of the error function to obtain material constants where the characterized material is not constrained by a certain boundary condition. It is shown from the research results that more accurate material parameters can be acquired to meet the actual requirements of material analysis by use of the simulated annealing method.
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