Sensitivity Enhancement of Nanostructured SnO<SUB>2</SUB> Gas Sensors Fabricated Using the Glancing Angle Deposition Method

0.5 wt.% Pd-catalyzed SnO2 thin-film gas sensors with microstructures controlled on a nanometer scale were fabricated by an e-beam evaporator using the glancing angle deposition (GAD) method. After annealing at 500 degrees C for 1 h, the sensors produced were polycrystalline with a nanoporous, tilted columnar microstructure. The gas-sensing properties of these SnO2 sensors were measured in the concentration range of 1 to 5 ppm NO2 at 250 degrees C and of 10 to 50 ppm C2H5OH at 400 degrees C, respectively. The sensors fabricated by e-beam evaporation in combination with the GAD method showed much higher sensitivities than normally prepared sensors and exhibited rapid response times. The gas sensitivity (S = R(gas)/R(air)) of the SnO2 sensor using the GAD method was 43.4 for 5 ppm NO2 and 0.08 for 10 ppm C2H5OH, respectively. These sensors showed excellent sensitivities compared to the normal thin film sensors (S = 2 for 5 ppm NO2 and 0.92 for 10 ppm C2H5OH). We consider that the nanostructured sensors produced using the GAD process could be used to detect various gases emitted by automobiles and industrial installations.