With the advancement of semiconductor manufacturing technology, the interest in high-purity isopropyl alcohol (IPA) has been growing, leading to increased demand for real-time detection of contaminants in IPA. Although various technologies have been developed to accurately detect impurities, there have been limitations in achieving rapid, reversible, and real-time detection. Herein, we report an N doped graphene (N-Gr) based surface plasmon resonance (SPR) sensor capable of detecting acetone at ppb-level dissolved in IPA and this sensor confirms the real-time detection of acetone with great reversibility and repeatability. Nitrogen dopants introduced into graphene via plasma treatment were thoroughly characterized using Raman spectroscopy, X-ray photoelectron spectroscopy, and transmission electron microscopy. The nitrogen dopants have been identified to form three distinct types of sites in graphene – graphitic, pyrrolic, and pyridinic – each imparting unique electrostatic characteristic to the graphene lattice. The adsorption of acetone to N-Gr is found to be stronger than that to pristine graphene because of electrostatic interaction, and the doping effect of N-Gr is demonstrated through density functional theory calculations and enhancement in sensing performance of N-Gr based SPR sensor. This study offers experimental and theoretical insights into the adsorption kinetics of acetone dissolved in IPA and provides promising perspectives for real-time sensing technology utilizing N-Gr to detect impurities in high-purity cleaning agents. Keywords: Surface plasmon resonance, Aliphatic compounds , N doped Graphene, Density functional theory
Sung Hwan Cho, Jun Min Suh, Wontaek Kim, Jaehyun Kim, Yeong Jae Kim, Tae Hyung Lee, Jae Young Kim, Jaegun Sim, Seung Won Choi, Byung Hee Hong, So Young Kim, Ho Won Jang
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