A method is presented for quantifying oxygen diffusion behavior in a nanodevice fabricated using individual ZnO nanowire/nanobelt. A nanodevice was built using a single nanobelt. Defects are introduced into nanobelt during specific nanofabrication procedure. Then, after the device being exposed to atmosphere for several days, oxygen in air diffused into the nanobelt and significantly changed the conductivity of the device. By comprising the experimentally measured conductivity and that of simulated result, the diffusion coefficient of oxygen in ZnO nanowires/nanobelts has been derived.
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