Properties of coated and modified surfaces

The ability to create surface and near-surface properties distinct from the bulk properties of a material by means of coating or surface modification techniques is an important new field of development for engineering materials, encompassing ion implantation, plasma processing, reactive deposition methods, ion beam deposition and modification, molecular beam epitaxy, and fast quench thermal processing. Attention is given to specific areas of process control which illustrate (1) the use of process development to control material properties, (2) the importance of surface modification and coating to the tribology and ion-surface interactions of semiconductor film growth, and (3) recent findings in surface science which exemplify potential applications of ion-surface interactions that generate novel material qualities.