Plasma implantation of inner wall of cylindrical insulating tube
Article 2003 en
Authors
XT
X.B. Tian
JY
Jihong Yan
SY
S.Q. Yang
Abstract
1 min read
Summary form only given, as follows. In this work, we conduct numerical investigation on the plasma implantation of the inner walls of insulating cylindrical tubes. Our I work focuses on the effects of the thickness of the insulating wall, inner diameter, distance between the negatively biased auxiliary electrode and the tube, and other factors.
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