Plasma-Based Surface Modification

Plasma surface modification has attracted much attention as both a research and production technology. Plasma nitriding is a relatively established technique in the metal industry, but new applications such as plasma nitriding of aluminum are being refined. Recently, the use of metal plasmas generated by vacuum arc plasma sources and gaseous plasmas in concert has greatly enhanced the versatility of the plasma implantationdeposition technique. It is fair to say that a single process most likely cannot satisfy all the requirements, and multiple processes may be necessary. For example, a titanium nitride coating fabricated on a plasmanitrided surface by physical vapor deposition (PVD) exhibits more superior wear resistance. In this chapter, plasma-based surface modification techniques including plasma nitriding, plasma implantation, plasma-assisted vapor deposition (PAVD), and hybrid processes are discussed with the focus on the enhancement of tribological properties of materials and industrial components. The advantages, limitations, and typical applications of each technique are described.