Phonon scattering in RHEED

Numerous inelastic scattering processes are involved in electron scattering. The mean-free-path length of inelastic scattering is about 50–300 nm for most materials, thus more than 50% of the electrons will be inelastically scattered if the specimen thickness is close to the mean-free-path length. Inelastic scattering not only affects the quality of REM images and RHEED patterns but also makes data quantification much more complex and inaccurate. In this chapter, we first outline the inelastic scattering processes in electron diffraction. Then phonon (or thermal diffuse) scattering will be discussed in detail. The other inelastic scattering processes will be described in Chapters 10 and 11.