P-type conductivity in bulk AlxGa1−xN and AlxGa1−xN/AlyGa1−yN superlattices with average Al mole fraction >20%

Synchrotron radiation photoemission spectroscopy reveals enhanced oxygen incorporation in AlxGa1−xN as the Al mole fraction increases. It is shown that the increased oxygen donor incorporation can result in a conductivity-type change from p-type to n-type in Mg-doped AlxGa1−xN. Consistent with the conductivity-type change, epitaxial Al0.20Ga0.80N films exhibit n-type conductivity despite heavy Mg doping. The p-type conductivity of bulk AlxGa1−xN with a high Al mole fraction can be improved by employing AlxGa1−xN/AlyGa1−yN superlattices (SLs). At 300 K, Mg-doped Al0.17Ga0.83N/Al0.36Ga0.64N SLs (average Al mole fraction of 23%) exhibit strong p-type conductivity with a specific resistance of 4.6 Ω cm, a hole mobility of 18.8 cm2/Vs, and an acceptor activation energy of 195 meV.