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Organofluorosilicate Glass (OFSG): A Dense Low K Dielectric with Superior Materials Properties — Mark L. O’Neill (2003) | RDL Network
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Organofluorosilicate Glass (OFSG): A Dense Low K Dielectric with Superior Materials Properties
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Jean Louis Vincent
Université Libre de Bruxelles
Organofluorosilicate Glass (OFSG): A Dense Low K Dielectric with Superior Materials Properties
Article
2003
en
Authors
+7 more
MO
Mark L. O’Neill
YC
Yulin Cheng
AL
A.S. Lukas
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