Optical projection lithography at half the Rayleigh resolution limit by two photon exposure

In recent years, with the advent of femtosecond pulse technology, two-photon absorption has commenced to be used for exposing photo-resists. It is natural to ask then, what is the spatial resolution of two-photon lithography? There has already been some discussion of resolution limits in two-photon, scanning confocal fluorescence microscopy. We will find that ordinary two-photon exposure of photo-resist merely enhances the photographic contrast, or gamma. While this improves the spatial resolution somewhat, it does so at the expense of a requirement for tighter control over the incident light intensity. Instead, we introduce a new type of exposure system employing a multiplicity of 2-photon excitation frequencies which interfere with one another to produce a super-resolution stationary image, exhibiting a true doubling of the spatial resolution.