On the morphology of Si/SiO2/Ni nanostructures with swift heavy ion tracks in silicon oxide
Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques 8(4): 805-813
Article 2014 English
Authors
SD
S. E. Demyanov
EK
Egor Kaniukov
АП
А.В. Петров
Abstract
1 min read
Si/SiO2/Ni nanostructures are fabricated by the irradiation of an oxidized Si surface with swift heavy ions, nanopore etching in the SiO2 layer, and the el
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