The resistivity of p-type ZnSe:N/GaAs heteroepitaxial layers grown by molecular beam epitaxy using a nitrogen free-radical source has been determined as a function of both substrate temperature and the Zn-to-Se beam equivalent pressure (BEP) ratio employed during growth. Layer resistivities were determined using a noncontact inductive-coupling radio-frequency measurement technique that provided sheet conductivity data from which layer resistivities were calculated. A minimum resistivity of 0.75 Ω cm has been measured to date for p-type ZnSe:N material grown at 235 °C with a BEP ratio of 1:2. Such a resistivity would imply a free-hole density in the range 4×1017−8×1017 cm−3 assuming the hole mobility to be in the range 20−10 cm2 V−1 s−1, respectively.
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