A direct and nondestructive measurement technique for the determination of the refractive index profiles of one- and two-dimensional LiNbO3 waveguides is presented for the first time to our knowledge. The technique generalizes the refracted near-field method, which is well known for optical fiber characterization. The spatial resolution and accuracy are 0.1 and 0.4 μm, respectively. The refractive-index calibration is done by an analysis of the near-field light power distribution, and its resolution is approximately 2 × 10−4. The proposed experimental setup permits sample installation and data acquisition in a few minutes.
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