Scanning probe lithography (SPL) techniques are mainly based on electrical, mechanical, and thermal interactions between a tip and substrates. By comparison, the electrical field‐induced SPL is highly attractive because a variety of chemical changes can be induced on the surface based on electrochemical reactions taking place during the lithography processes. In this review, we provide an overview of recent advances in the field of electrical field‐induced SPL processes, i.e., the local electrochemical lithography. Different substrate materials are discussed, and new concepts, applications and technological improvements are presented.
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