Nanometer Resolution Self‐Powered Static and Dynamic Motion Sensor Based on Micro‐Grated Triboelectrification

A one-dimensional displacement and speed sensing technology that consists of a pair of micro-grating structures and utilizes the coupling between the triboelectric effect and electrostatic induction is demonstrated. Its distinct advantages, including being self-powered, high resolution, large dynamic range, and long detecting distance, show extensive potential applications in automation, manufacturing, process control, and portable devices.