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Nano-Scale Wear Mechanisms in Polysilicon for MEMS Applications. — Michael T. Dugger (2007) | RDL Network
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Nano-Scale Wear Mechanisms in Polysilicon for MEMS Applications.
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Robert O. Ritchie
University of California, Berkeley
Nano-Scale Wear Mechanisms in Polysilicon for MEMS Applications.
Article
2007
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