Modified Phasor-Particle Model of Treating A Blocking Capacitor As A Phasor Element in Simulation of Plasma Coupling with An External Auto-Matching Network

A phasor‐particle model has been developed to numerical simulated the radio‐frequency (RF) capacitive coupling between an external matching network and a low pressure electrical plasma. Gauss’s law was applied to the blocking capacitor in this model. Non‐linearly current was observed flowing into the blocking capacitor. A new method of treating the blocking capacitor as a phasor element is developed such that identical current is flowing through the blocking capacitor. A big impact on the circuit voltages and currents are observed when simulating the asymmetric system by the new method. The proposed method can be applied to quasi‐matching condition.