Microstructure and mechanical properties of CrN films fabricated by high power pulsed magnetron discharge plasma immersion ion implantation and deposition

Zhongzhen Wu; Xiubo Tian; Zeming Wang; Chunzhi Gong; Shiqin Yang; Cher Ming Tan; Paul Kim Ho Chu

doi:10.1016/j.apsusc.2011.08.039

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Microstructure and mechanical properties of CrN films fabricated by high power pulsed magnetron discharge plasma immersion ion implantation and deposition

Article 2011 en

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