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Microstructural improvement of sputtered ZrO2 thin films by substrate biasing — Anping Huang (2005) | RDL Network
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Microstructural improvement of sputtered ZrO2 thin films by substrate biasing
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Paul Kim Ho Chu
Microstructural improvement of sputtered ZrO2 thin films by substrate biasing
Article
2005
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Authors
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Anping Huang
Paul Kim Ho Chu
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