Microlithography by Using Neutral Metastable Atoms and Self-Assembled Monolayers: Dosing Studies and Optical Patterning

Karl K. Berggren; A. P. Chu; Mara Prentiss; Jim Wilbur; George M M Whitesides; A. Bard; J. D. Gillaspy; Jabez J. McClelland; William Phillips; S. L. Rolston

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Microlithography by Using Neutral Metastable Atoms and Self-Assembled Monolayers: Dosing Studies and Optical Patterning

Article 1996 en

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