Micro‐Electromechanical Switch: A 0.2 V Micro‐Electromechanical Switch Enabled by a Phase Transition (Small 14/2018)

In article number 1703621, Zheng You, Jie Yao, Junqiao Wu, and co-workers demonstrate a micro-electromechanical (MEM) switch with 0.2 V operating voltage and ≳106 safe operating cycles in ambient air, which is mainly enabled by the abrupt phase transition of nanolayered vanadium dioxide slightly above room temperature. This device is also used to demonstrate a temperature alarm/switch with ultralow power consumption. Such phase-transition MEM switches would open possibilities for sub 1 V hybrid integrated devices/circuits/systems and ultralow power consumption devices for practical applications.