Mass Transfer System of a Large Number of Small Objects Based on Conjunction of Triboelectric Nanogenerators and Photo‐Responsive Interface

Abstract Mass transfer technology for large quantities of tiny substances, such as electronic chips and drug particles, plays a crucial role in many industries. This study proposes a transferring system for large quantities of small objects based on the synergism of triboelectric nanogenerators (TENGs) and photo‐responsive dielectric materials. TENG device can provide an output voltage of over 8 kV within a rotation time of 40 ms and the titanium oxide phthalocyanine (TiOPc) photoconductive films are fabricated as the photo‐responsive interface, in order to match the output impedance of TENG. The transfer system enables a maximum adsorption load of 98 mg mm −2 , which is enough for handling all common electronics chips/wafers. Under the stimulation of laser light, the conductivity of the TiOPc interface can be increased by two orders of magnitude within 1 ms, which leads to the vanish of the surface potential on the laser spot and the release of patterned or pointed object. This photo‐responsive strategy can achieve both large quantity transfer of tiny objects and highly selective release of the element at designed position. This collaborative mechanism of electrostatic force and photoconductivity provides a different approach for realizing efficient and precise Mass transfer system of semiconductor and chip industry.