Improving the plasma immersion ion implantation impact energy inside a cylindrical bore by using an auxiliary electrode

We propose a method to improve the impact energy of ions implanted into the interior sidewalls of cylindrical specimens during plasma immersion ion implantation. Our idea is based on a zero potential conductive auxiliary electrode positioned at the axis of the implanted cylindrical bore. We calculate the structure of the ion-matrix sheath in an infinitely long cylindrical bore with an auxiliary electrode and analyze the dependence of the radius of the auxiliary electrode on the electric field in the bore. Our results show that the auxiliary electrode improves significantly the distributions of the potential and the electric field inside the cylindrical bore. In addition, because the auxiliary electrode improves the potential drop from axis to sidewalls of the bore and introduces an electric field component which does not vary when the ions are implanted into the sidewalls, the impact energy can be improved in a cylindrical bore during plasma immersion ion implantation.