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Improvement of oxidation behaviour of dense silicon nitride by surface modification — Chr. Taut (1994) | RDL Network
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Improvement of oxidation behaviour of dense silicon nitride by surface modification
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Yury Gogotsi
Improvement of oxidation behaviour of dense silicon nitride by surface modification
Article
1994
en
Authors
+2 more
CT
Chr. Taut
MH
Mathias Herrmann
GG
G. Große
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