High‐Throughput Near‐Field Optical Nanoprocessing of Solution‐Deposited Nanoparticles

Abstract The application of nanoscale electrical and biological devices will benefit from the development of nanomanufacturing technologies that are high‐throughput, low‐cost, and flexible. Utilizing nanomaterials as building blocks and organizing them in a rational way constitutes an attractive approach towards this goal and has been pursued for the past few years. The optical near‐field nanoprocessing of nanoparticles for high‐throughput nanomanufacturing is reported. The method utilizes fluidically assembled microspheres as a near‐field optical confinement structure array for laser‐assisted nanosintering and nanoablation of nanoparticles. By taking advantage of the low processing temperature and reduced thermal diffusion in the nanoparticle film, a minimum feature size down to ≈100 nm is realized. In addition, smaller features (50 nm) are obtained by furnace annealing of laser‐sintered nanodots at 400 °C. The electrical conductivity of sintered nanolines is also studied. Using nanoline electrodes separated by a submicrometer gap, organic field‐effect transistors are subsequently fabricated with oxygen‐stable semiconducting polymer.