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Formation of silicon on plasma synthesized SiOxNy and reaction mechanism — Ming Zhu (2004) | RDL Network
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Formation of silicon on plasma synthesized SiOxNy and reaction mechanism
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Paul Kim Ho Chu
Formation of silicon on plasma synthesized SiOxNy and reaction mechanism
Article
2004
en
Authors
+4 more
MZ
Ming Zhu
XS
Xuejie Shi
PC
Peng Chen
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