Formation of silicon-on-aluminum nitride using ion-cut and theoretical investigation of self-heating effects

Ming Zhu; Weili Liu; Zhitong Song; Ricky K.Y. Fu; Paul Kim Ho Chu; Chenglu Lin

doi:10.1016/j.matlet.2004.10.035

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Formation of silicon-on-aluminum nitride using ion-cut and theoretical investigation of self-heating effects

Article 2004 en

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